Units: 3

Fundamental material, electrical and chemical properties of solid metal, semiconductor, insulator and organic surfaces applied to selected gas-solid surface chemical reactions important in semiconductor processing and heterogeneous catalysis. This course is designed to introduce students to the chemistry and physics of solid surfaces and interfaces with an emphasis on the gas-solid interface. The first half of the course is devoted to learning the fundamental material, electrical and chemical properties of solid surfaces. The second half covers applying these fundamentals to topics in chemical catalysis and integrated circuit manufacture. Concurrent with CHEE 527.

Prerequisite(s): Engineering Advanced Standing or advanced standing in Chemistry, Physics or Optical Sciences
Usually offered: Spring
 

Instructor(s)

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